한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.44-44
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- 2009
Flexible Display용 Low Temp Process를 이용한 ZnO TFT의 제작 및 특성 평가
Fabrication and Characteristics of ZnO TFTs for Flexible Display using Low Temp Process
- 김영수 (충남대학교) ;
- 강민호 (충남대학교) ;
- 남동호 (충남대학교) ;
- 최광일 (충남대학교) ;
- 오재섭 (충남대학교) ;
- 송명호 (충남대학교) ;
- 이희덕 (충남대학교) ;
- 이가원 (충남대학교)
- Kim, Young-Su (Chungnam Univ.) ;
- Kang, Min-Ho (Chungnam Univ.) ;
- Nam, Dong-Ho (Chungnam Univ.) ;
- Choi, Kang-Il (Chungnam Univ.) ;
- Oh, Jae-Sub (Chungnam Univ.) ;
- Song, Myung-Ho (Chungnam Univ.) ;
- Lee, Hi-Deok (Chungnam Univ.) ;
- Lee, Ga-Won (Chungnam Univ.)
- 발행 : 2009.06.18
초록
Recently, transparent ZnO-based TFTs have attracted much attention for flexible displays because they can be fabricated on plastic substrates at low temperature. We report the fabrication and characteristics of ZnO channel layers(ZnO TFTs) having different channel thicknesses. The ZnO film were deposited as active channel layers on