한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.19-19
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- 2009
$TiN_xO_y/TiN_x$ 다층 박막을 이용한 고저항 박막 저항체의 특성평가
Characteristic and Electrical Properties of $TiN_xO_y/TiN_x$ Multilayer Thin Film Resistors with a High Resistance
- Park, Kyoung-Woo (School of Nano Science and Technology, Chungnam National University) ;
- Hur, Sung-Gi (School of Nano Science and Technology, Chungnam National University) ;
- Ahn, Jun-Ku (School of Nano Science and Technology, Chungnam National University) ;
- Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University)
- 발행 : 2009.06.18
초록
TiNxOy/TiNx multilayer thin films with a high resistance (~ k