Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.13-13
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- 2009
Mechanically Flexible PZT thin films on Plastic Substrates
플라스틱 기판위의 기계적으로 유연성을 가진 PZT 박막
- Rho, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Ahn, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Lee, Nae-Eung (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Ahn, Joung-Ho (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Kim, Sang-Jin (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS) ;
- Lee, Hwan-Soo (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS)
- 노종현 (성균관대학교 신소재공학부) ;
- 안종현 (성균관대학교 신소재공학부) ;
- 안정호 (성균관대학교 신소재공학부) ;
- 이내응 (성균관대학교 신소재공학부) ;
- 김상진 (삼성전기 중앙연구소 eMD Lab.) ;
- 이환수 (삼성전기 중앙연구소 eMD Lab.)
- Published : 2009.06.18
Abstract
We have investigated the fabrication and properties of bendable PZT film formed on plastic substrates for the application in flexible memory. These devices used the PZT active layer formed on