한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

Plastic 기판 상의 투명성과 유연성을 지닌 Zinc Oxide 박막 트랜지스터

Mechanically Flexible and Transparent Zinc Oxide Thin Film Transistor on Plastic Substrates

  • 박경애 (성균관대학교 신소재공학부) ;
  • 안종현 (성균관대학교 신소재공학부)
  • Park, Kyung-Yea (School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Ahn, Jong-Hyun (School of Advanced Materials Science and Engineering, Sungkyunkwan University)
  • 발행 : 2009.06.18
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초록

We have fabricated transparent and flexible thin film transistor(TFT) on polyethylene terephthalate(PET) substrate using Zinc Oxide (ZnO) and Indium Tin Oxide (ITO) film as active layer and electrode. The transfer printing method was used for printing the device layer on target plastic substrate at room temperature. This approach have an advantage to separate the high temperature annealing process to improve the electrical properties of ZnO TFT from the device process on plastic substrate. The resulting devices on plastic substrate presented mechanical and electrical properties similar with those on rigid substrate.

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