Hot-filament 플라즈마화학기상증착법 이용하여 DLC층 위에 탄소나노튜브의 선택적 배열

As we note the electric properties of carbon nanotube, we need to generate carbon nanotubes vertically. Generally, metal catalysts are used to synthesis carbon nanotubes. But through using DLC, dense patricles could be gotten easily. Compare to the case of using metal catalysts, the case of using DLC can conduct vertical grwoth of CNTs easily. In this paper, we changed growth temperature (550, 650, $7500^{\circ}C$) and growth time (3, 6, 9 min) in order to confirm synthesize vertical growth of CNTs on substrates.