한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 추계학술대회 논문집
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- Pages.10-10
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- 2009
Dielectric $Bi_3NbO_7$ thin film grown on flexible substrates by Nano Cluster Deposition
- Lee, Hyun-Woo (School of Nano Science and Technology, Chungnam National University) ;
- Yoon, Soon-Gil (School of Nano Science and Technology, Chungnam National University)
- 발행 : 2009.11.12
초록
Transparent BNO thin films were grown on Al-doped ZnO (AZO)/Ag/AZO/polyethersulfon (PES) (abbreviated as AAAP) transparent electrodes at a low temperature by the NCD technique. The BNO films grown on the crystallized AZO/Ag/AZO (AAA) electrodes exhibit an amorphous phase with a root mean square (rms) roughness of approximately 2 nm in the range of deposition temperature. The capacitors (Pt/BNO/AAAP) with BNO films grown at