한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1575-1577
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- 2009
Continuous Roll-to-Roll(R2R) sputtering system for growing flexible and transparent conducting oxide electrode at room temperature
- Park, Yong-Seok (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
- Jeong, Jin-A (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
- Park, Ho-Kyun (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University) ;
- Kim, Han-Ki (Dept. of Display Materials Engineering & Regional Innovation Center for Component and Materials for Information Displays, Kyung Hee University)
- Published : 2009.10.12
Abstract
We have investigated the characteristics of transparent indium zinc oxide(IZO)/Ag/IZO multilayer electrode grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible device are described. By the continuous R2R sputtering of the bottom IZO, Ag, and top IZO layers at room temperature, we were able to fabricate an IZO-Ag-IZO multilayer electrode with a sheet resistance of 6.15