한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1483-1485
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- 2009
Atmospheric pressure plasma deposition of $SiO_X$ thin films by direct-Type pin-to-plate dielectric barrier discharge for flexible displays
- Gil, Elly (Department of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Lee, June-Hee (Department of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Kim, Yang-Su (Department of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
- Yeom, Geun-Young (Department of Advanced Materials Science and Engineering, Sungkyunkwan University)
- Published : 2009.10.12
Abstract
Silicon dioxide (