한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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- Pages.1428-1429
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- 2009
Enhanced Properties of IZO Thin Film Prepared by Nano-Powder Target
- Ji, Seung-Hun (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Youn, Hyun-Oh (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Seo, Sung-Bo (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Kim, Mi-Sun (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Sohn, Sun-Young (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Kim, Jong-Jae (Department of Electronics & Display Engineering, Catholic University of Daegu) ;
- Kim, Hwa-Min (Department of Electronics & Display Engineering, Catholic University of Daegu)
- 발행 : 2009.10.12
초록
Compared to the indium zinc oxide (IZO) film fabricated by micro-powder target, the IZO film with nano-powder target exhibited improved optoelectronic properties of wide bandgap, high transmittance, surface uniformity, and low sheet resistance due to the high film density.