한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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- Pages.1415-1417
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- 2009
Preparation and characterization of high transmittance and low resistance index matched transparent conducting oxide coated glass for liquid crystal on silicon panel
- Jang, Chang-Young (Selcos Co. Ltd) ;
- Paik, Woo-Sung (Selcos Co. Ltd) ;
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Choi, Bum-Ho
(National Center for Nanoprocess and Equipments, Korea Institute of Industrial Technology)
;
- Kim, Young-Back (National Center for Nanoprocess and Equipments, Korea Institute of Industrial Technology) ;
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Lee, Jong-Ho
(National Center for Nanoprocess and Equipments, Korea Institute of Industrial Technology)
- 발행 : 2009.10.12
초록
High transmittance and low resistance index matched transparent conducting oxide (IMTCO) coated glass was prepared and characterized. IMTCO was deposited by RF magnetron sputtering with the thickness of 15nm and 90nm thick anti-reflection layer was evaporated. To modify surface to hydrophilic, in-situ plasma treatment was also performed. IMTCO coated glass exhibited 96.6% of transmittance in the wavelength range of 400~700nm which is relatively high value compared to commercially available IMTCO glass. The sheet resistance uniformity was measured to be 1.53%.