한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.553-556
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- 2009
Crystallization of amorphous Si by pulse annealing with Ni ferritins
- Tojo, Yosuke (Nara Institute of Science and Technology) ;
- Miura, Atsushi (Nara Institute of Science and Technology) ;
- Fuyuki, Takashi (Nara Institute of Science and Technology) ;
- Yamashita, Ichiro (Nara Institute of Science and Technology) ;
- Uraoka, Yukiharu (Nara Institute of Science and Technology)
- Published : 2009.10.12
Abstract
We investigated an application of supramolecular protein, and demonstrated the metal induced lateral crystallization utilizing ferritins with Ni nanoparticles, named the "bio-nano-crystallization". So far, this method has required long time, because of this method condition based on the conventional solid phase crystallization. In this study, we applied the pulsed rapid thermal annealing to bio-nanocrystallization. As a result, we succeeded in the crystallization for a short time. We found that the TFTs characteristics were improved with decrease metal impieties in poly-Si thin films by this method.