한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2009년도 춘계학술대회 논문집
- /
- Pages.202-203
- /
- 2009
Improvement of Si solar cell efficiency by using surface treatments on the antireflection coating layers and electrodes
- Yang, Cheng (SKKU Advanced Institute of Nanotechnology (SAINT) Sungkyunkwan University) ;
- Ryu, Seung-Heon (SKKU Advanced Institute of Nanotechnology (SAINT) Sungkyunkwan University) ;
- Yoo, Won-Jong (SKKU Advanced Institute of Nanotechnology (SAINT) Sungkyunkwan University) ;
- Kim, Dong-Ho (Semiconductor Device Laboratory, Sanaung Advanced Institute of Technology) ;
- Kim, Teak (Semiconductor Device Laboratory, Sanaung Advanced Institute of Technology)
- 발행 : 2009.05.27
초록
Plasma etching was studied to obtain high-efficiency Si solar cells. SiN nanoparticles were observed upon the plasma treatment using SF6 gas. The mechanism of the nanoparticles formation has been studied. A net increase in the current density (Jsc) of the cells of
키워드