Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2009.04a
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- Pages.579-580
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- 2009
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- 1598-2548(pISSN)
Performance Estimation of Active Electro-Magnetic Isolator for Semiconductor Manufacturing Machine
반도체 장비용 전자기식 능동 제진 장치의 성능 예측 평가
Abstract
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