대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2009년도 정보 및 제어 심포지움 논문집
- /
- Pages.335-337
- /
- 2009
주사전자 현미경의 통계적 인자 해석
Statistical Factor Analysis of Scanning Electron Microscope
초록
A scanning electron microscope(SEM) is a system that visualizes complex surface features. The resolution of SEM is affected by each of equipment components. In this study, we examined the effects of the four factors including the beam current, magnification, voltage and working distance. A statistical analysis was conducted to investigate the main and interaction effects. For a systematic characterization, a