Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2009.06a
- /
- Pages.1027-1028
- /
- 2009
- /
- 2005-8446(pISSN)
Measurement of multi-axes errors between linear and rotational tables of a ultra-precision machine tools for generating micro patterns on the large surfaces
대면적 미세형상 가공기의 직선/회전 다축 오차 측정
- Published : 2009.06.03