Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2009.06a
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- Pages.879-880
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- 2009
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- 2005-8446(pISSN)
Fabrication of Planar-type Nano Structures on thin Graphite layer using Focused Ion Beam 3-D Etching Technique
- Gunasekaran, V. (Nano Materials and System lab, Graduate School of Science and Technology, Jeju National University) ;
- Kim, S.J. (Dept of Mechatronics Engineering, Jeju National University)
- Published : 2009.06.03