Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2009.10a
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- Pages.707-708
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- 2009
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- 2005-8446(pISSN)
Effect of acryl copolymer compositon on the wettability of thin wafer surface
아크릴공중합체 조성에 따른 초박형웨이퍼표면의 젖음성 변화
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