대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2009년도 제40회 하계학술대회
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- Pages.1517_1518
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- 2009
Wrinkle / buckling 현상을 이용한 나노채널의 제작과 그 응용
Fabrication of nanofluidic channels with directed wrinkle/buckling patterns
- Chung, Seok (Korea University) ;
- Moon, Myoung-Woon (KIST) ;
- Lee, Jeong-Hoon (Kwangwoon University) ;
- Han, Jong-Yoon (MIT) ;
- Kamm, Roger D. (MIT)
- 발행 : 2009.07.14
초록
Interest has grown recently in the concept of "unconventional nanofabrication", the creation of nanoscale features by methods that avoid the technical hurdles and high cost of nano-lithographic processes. One of the challenges has been to reliably and inexpensively produce channels of nanometer dimension, as small as 60 nm, in the materials commonly used for soft lithography. In this manuscript, we present new approaches based on simple concepts of wrinkle and buckling patterns.
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