Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A comparative study on Q-factors of fused quartz and silicon micro cantilevers

비정질 수정과 실리콘 마이크로 캔틸레버 구조물의 Q-factor 비교 연구

  • Song, Eun-Seok (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Baek, Chang-Wook (School of Electrical and Electronics Engineering, Chung-Ang University)
  • 송은석 (서울대학교 전기컴퓨터공학부) ;
  • 김용권 (서울대학교 전기컴퓨터공학부) ;
  • 백창욱 (중앙대학교 전자전기공학부)
  • Published : 2009.07.14
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Abstract

In this paper, micro cantilevers which are made of two different materials - fused quartz and single crystalline silicon - and have similar dimensions were fabricated and their mechanical Q-factors were evaluated to compare intrinsic damping properties of those two materials. Resonant frequencies and Q-factors were measured for the cantilevers having fixed widths and thicknesses, and different lengths. The measured Q-values are in a range of 64,000 - 108,000 for fused quartz cantilevers, and 31,000 - 35,000 for silicon cantilevers, respectively. Experimental results support high Q-factors of fused quartz compared to single crystalline silicon due to its good intrinsic damping properties.

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