Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
- /
- Pages.1349_1350
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- 2009
Interface Charateristics of Plasma co-Polymerized Insulating Film/Pentacene Semiconductor Film
플라즈마 공중합 고분자 절연막과 펜타센 반도체막의 계면특성
-
Shin, Paik-Kyun
(Inha University)
;
- Lim, H.C. (Taegu Tech. Coll.) ;
- Yuk, J.H. (Yuhan Coll) ;
- Park, J.K. (Yuhan Coll) ;
- Jo, G.S. (Yuhan Coll) ;
- Nam, K.Y. (Yuhan Coll) ;
- Park, J.K. (Kangwon national Univ.) ;
- Kim, Y.W. (Saekyung Coll.) ;
- Chung, M.Y. (SEWON SI)
-
신백균
(인하대학교)
;
- 임헌찬 (대구공업대학) ;
- 육재호 (유한대학) ;
- 박종관 (유한대학) ;
- 조기선 (유한대학) ;
- 남광우 (유한대학) ;
- 박종국 (국립강원대학교) ;
- 김용운 (세경대학) ;
- 정무영 (세원에스아이)
- Published : 2009.07.14
Abstract
Thin films of pp(ST-Co-VA) were fabricated by plasma deposition polymerization (PVDPM) technique. Properties of the plasma polymerized pp(ST-Co-VA) thin films were investigated for application to semiconductor device as insulator. Thickness, dielectric property, composition of the pp(ST-Co-VA) thin films were investigated considering the relationship with preparation condition such as gas pressure and deposition time. In order to verify the possibility of application to organic thin film transistor, a pentacene thin film was deposited on the pp(ST-Co-VA) insulator by vacuum thermal evaporation technique. Crystalline property of the pentacene thin film was investigated by XRD and SEM, FT-IR. Surface properties at the pp(ST-Co-VA)/pentacene interface was investigated by contact angle measurement. The pp(ST-Co-VA) thin film showed a high-k (k=4.6) and good interface characteristic with pentacene semiconducting layer, which indicates that it would be a promising material for organic thin film transistor (OTFT) application.
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