대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2009년도 제40회 하계학술대회
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- Pages.1342_1342
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- 2009
Sol-gel 공정으로 제작된 산화물 반도체 박막 트랜지스터
Sol-gel processed oxide semiconductor thin-film transistors for active-matrix displays
- Kim, Yong-Hoon (Korea Electronics Technology Institute) ;
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Park, Sung-Kyu
(Korea Electronics Technology Institute) ;
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Oh, Min-Seok
(Korea Electronics Technology Institute) ;
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Han, Jeong-In
(Korea Electronics Technology Institute)
- 발행 : 2009.07.14
초록
Zinc tin oxide (ZTO) based thin-film transistors (TFTs) were fabricated on glass substrate by using sol-gel method. The fabricated ZTO TFT had bottom gate and top contact structure with ZTO layer formed by spin coating from ZTO solution. The fabricated TFT showed field-effect mobility of about 2 -
키워드