Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
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- Pages.1312_1313
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- 2009
Electric properties of DLC Emitter
DLC Emitter 전기적 특성
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Lee, Sang-Heon
(Department of Electronic Engineering Sunmoon University)
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이상헌
(선문대학교 전자공학과)
- Published : 2009.07.14
Abstract
In this study the fabrication technique of the planner field emission device structure with a DLC layer were studied. The bottom Mo electrode using electrochemical method on the DLC layer deposited using assist sputtering.
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