Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2008.06a
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- Pages.487-488
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- 2008
Physical Properties of Thin Films Generated by Two Kinds of Different Function
2가지 서로 다른 기능에 의해 생성된 박막의 물리적인 특성의 기원
- Oh, Teresa (School of Electronics and Information Engineering Cheongju University)
- 오데레사 (청주대학교 반도체설계공학과)
- Published : 2008.06.18
Abstract
SiOC films containing alkyl groups have a low dielectric constant because of the interaction between the C-H hydrogen bonds and the oxygen of high electro-negative atom. The Si-
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