한국신재생에너지학회:학술대회논문집
- 2008.05a
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- Pages.397-397
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- 2008
Effect of deposition rates of PECVD silicon nitride films on passivation for silicon solar cells
- Lee, Joon-Sung (Dept. of Mat. Sci. and Eng., Korea University) ;
- Lim, Hee-Jin (Dept. of Mat. Sci. and Eng., Korea University) ;
- Kwon, Soon-Woo (TS Corporation R&D Center) ;
- Yoon, Sewang (TS Corporation R&D Center) ;
- Kim, Dong-Hwan (Dept. of Mat. Sci. and Eng., Korea University)
- Published : 2008.05.22