Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
- /
- Pages.316-316
- /
- 2008
Properties of Si thin films by hyperthermal neutral beam
- Oh, Kyoung-Suk (National Fusion Research Institute) ;
- Choi, Sung-Woong (Han-Dong Global University) ;
- Kim, Dae-Chul (National Fusion Research Institute) ;
- Yoo, Suk-Jae (National Fusion Research Institute) ;
- Park, Young-Chun (Han-Dong Global University) ;
-
Hong, Mun-Pyo
(Korea University)
;
- Kim, Young-Woo (National Fusion Research Institute) ;
- Lee, Bon-Ju (National Fusion Research Institute)
- Published : 2008.08.20
Abstract
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