한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.295-295
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- 2008
Extreme ultraviolet (EUV)measurement and Plasma diagnostics of the coaxial focused plasma in accordance with Argon pressure for EUV light source
- Hong, Young-June (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University) ;
- Kwon, Gi-Chung (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University) ;
- Shin, Hee-Myung (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University) ;
- Choi, Eun-Ha (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University)
- 발행 : 2008.08.20