Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
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- Pages.295-295
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- 2008
Extreme ultraviolet (EUV)measurement and Plasma diagnostics of the coaxial focused plasma in accordance with Argon pressure for EUV light source
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Hong, Young-June
(Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University)
;
- Kwon, Gi-Chung (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University) ;
- Shin, Hee-Myung (Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University) ;
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Choi, Eun-Ha
(Charged Particle Beam and Plasma Laboratory/PDP Research Center, Department of Electrophysics, Kwangwoon University)
- Published : 2008.08.20
Abstract
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