한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.292-292
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- 2008
Study on dry-etching of polysilicon films using ICP poly etcher system
- Kim, Myoung-Hwa (Department of Chemistry, Sungkyunkwan University) ;
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Nam, Sang-Hun
(Department of Chemistry, Sungkyunkwan University)
;
- Cho, Sang-Jin (Department of Chemistry, Sungkyunkwan University) ;
- Hyun, Jae-Sung (Department of Chemistry, Sungkyunkwan University) ;
-
Boo, Jin-Hyo
(Department of Chemistry, Sungkyunkwan University)
- 발행 : 2008.08.20