Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
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- Pages.292-292
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- 2008
Study on dry-etching of polysilicon films using ICP poly etcher system
- Kim, Myoung-Hwa (Department of Chemistry, Sungkyunkwan University) ;
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Nam, Sang-Hun
(Department of Chemistry, Sungkyunkwan University)
;
- Cho, Sang-Jin (Department of Chemistry, Sungkyunkwan University) ;
- Hyun, Jae-Sung (Department of Chemistry, Sungkyunkwan University) ;
-
Boo, Jin-Hyo
(Department of Chemistry, Sungkyunkwan University)
- Published : 2008.08.20
Abstract
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