한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.263-263
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- 2008
축전결합플라즈마의 전자가열 연구와 응용
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Yu, Sin-Jae
(Vacuum Center, Korea Research Institute of Standards and Science) ;
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Kim, Jeong-Hyeong
(Vacuum Center, Korea Research Institute of Standards and Science) ;
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Seong, Dae-Jin
(Vacuum Center, Korea Research Institute of Standards and Science) ;
- No, Gi-Min (Vacuum Center, Korea Research Institute of Standards and Science) ;
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Park, Min
(Vacuum Center, Korea Research Institute of Standards and Science) ;
- Pyeon, Seung-Cheol (Vacuum Center, Korea Research Institute of Standards and Science)
- 발행 : 2008.08.20