Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
- /
- Pages.263-263
- /
- 2008
축전결합플라즈마의 전자가열 연구와 응용
-
Yu, Sin-Jae
(Vacuum Center, Korea Research Institute of Standards and Science) ;
-
Kim, Jeong-Hyeong
(Vacuum Center, Korea Research Institute of Standards and Science) ;
-
Seong, Dae-Jin
(Vacuum Center, Korea Research Institute of Standards and Science) ;
- No, Gi-Min (Vacuum Center, Korea Research Institute of Standards and Science) ;
-
Park, Min
(Vacuum Center, Korea Research Institute of Standards and Science) ;
- Pyeon, Seung-Cheol (Vacuum Center, Korea Research Institute of Standards and Science)
- Published : 2008.08.20
Abstract
Keywords