축전결합플라즈마의 전자가열 연구와 응용

• Yu, Sin-Jae (Vacuum Center, Korea Research Institute of Standards and Science) ;
• Kim, Jeong-Hyeong (Vacuum Center, Korea Research Institute of Standards and Science) ;
• Seong, Dae-Jin (Vacuum Center, Korea Research Institute of Standards and Science) ;
• No, Gi-Min (Vacuum Center, Korea Research Institute of Standards and Science) ;
• Park, Min (Vacuum Center, Korea Research Institute of Standards and Science) ;
• Pyeon, Seung-Cheol (Vacuum Center, Korea Research Institute of Standards and Science)

• 유신재 ;
• 김정형 ;
• 성대진 ;
• 노기민 ;
• 박민 ;
• 편승철

• Published : 2008.08.20

• PDF