한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.112-112
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- 2008
Effects of Sputtering power and target-substrate distance on the microstructures of AlN thin films fabricated by reactive RF sputtering
- 발행 : 2008.08.20