Influence of WIP conditions on dimensional change of LTCC sheet

온간 정수압 공정 조건에 따른 LTCC sheet의 수축률

LTCC (Low Temperature Co-fired Ceramic) has been successfully applied to ceramic substrates for circuits and micro-fluidic systems and has proven its superior performance in a variety of applications. The prediction of shrinkage in LTCC process is an important for dimensional control of micro LTCC products which has influences on electronic characteristics. For avoiding the unpredictable shrinkage of LTCC during the sintering which makes accurate placement of the circuit devices difficult, pre-processes such as WIP (Warm Isostatic Pressing) and lamination must be modified. The objective of the present investigation is to establish a proper WIP conditions for near net shape fabrication of LTCC products. This paper discusses the influence of WIP conditions on the dimensional change of LTCC sheet. In the investigation, it is shown that the shrinkage values of sheets depend on WIP conditions and sheet directions. This work is a quantitative evaluation of the effect of WIP pressure on shrinkage of LTCC sheet. Additionally, the results show anisotropic shrinkage behaviour of sheet during LTCC process.