Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.06a
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- Pages.287-288
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- 2008
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- 2005-8446(pISSN)
Simulation of Electrostatic Suspension System Based On Delay Controller for Use in Vacuum Environment
시간지연 제어기를 이용한 진공환경에서의 정전부상시스템에 관한 시뮬레이션
Abstract
Keywords
- Electrostatic suspension;
- Silicon wafer;
- Suspension;
- Time delay;
- Delay controller;
- Vacuum environment