Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
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- Pages.378-378
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- 2008
Reaction Modeling on Titanium Nitride Byproducts in CVD Trap System
- Choi, Seong-Ho (Department of Chemical Engineering, Sungkyunkwan University) ;
- Pang, Chang-Hyun (Department of Chemical Engineering, Sungkyunkwan University) ;
- Cho, Che-Hoo (Milaebo Tech. co. Hwasung) ;
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Chae, Hee-Yeop
(Department of Chemical Engineering, Sungkyunkwan University)
- Published : 2008.02.14