한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제34회 동계학술대회 초록집
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- Pages.359-359
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- 2008
Effect on the CNx molecular behavior in N$_2$ plasma during deposition of carbon nitride film by RF magnetron sputtering
- No, Gi-Min (KAIST) ;
- Choe, Si-Gyeong (KAIST) ;
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Kim, Jeong-Hyeong
- 발행 : 2008.02.14