Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
- /
- Pages.314-314
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- 2008
Non-volatile Memory Behaviors of $Al_2O_3/Cu/Al_2O_3$ Multi-layers prepared by ALD
-
Lee, Byung-Kook
(Device Materials Research Center, Korea Research Institute of Chemical Technology)
;
- Lee, Jun-Young (Department of Material Science and Engineering, Hongik University) ;
- Chae, Won-Mook (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
-
Lee, Sun-Sook
(Device Materials Research Center, Korea Research Institute of Chemical Technology)
;
- Hwang, Jin-Ha (Department of Material Science and Engineering, Hongik University) ;
-
Chung, Taek-Mo
(Device Materials Research Center, Korea Research Institute of Chemical Technology)
;
- Kim, Chang-Gyoun (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
-
An, Ki-Seok
(Device Materials Research Center, Korea Research Institute of Chemical Technology)
- Published : 2008.02.14
Abstract
Keywords