한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제34회 동계학술대회 초록집
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- Pages.299-299
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- 2008
Direct Deposition of microcrystalline Si Films at Low Temperatures (<200 $^{\circ}C$ ) by Catalytic CVD
- Kim, Tae-Hwan (Dept. of Nano Science and Technology, University of Seoul) ;
- Lee, Kyung-Min (Dept. of Nano Science and Technology, University of Seoul) ;
- Won, Sung-Hwan (Dept. of Nano Science and Technology, University of Seoul) ;
- Sok, Jung-Hyun (Dept. of Nano Science and Technology, University of Seoul) ;
- Park, Kyoung-Wan (Dept. of Nano Science and Technology, University of Seoul) ;
- Hong, Wan-Shick (Dept. of Nano Science and Technology, University of Seoul)
- 발행 : 2008.02.14