Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
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- Pages.292-292
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- 2008
Photoluminescence characteristics of Si nano-dots in the SiN$_x$ film fabricated at a low temperature ($\leq$ 200 $^{\circ}C$ )
- Lee, Kyoung-Min (Department of Nano Science and Technology, University of Seoul) ;
- Kim, Tae-Hwan (Department of Nano Science and Technology, University of Seoul) ;
- Lee, Kyung-Su (Department of Nano Science and Technology, University of Seoul) ;
- Won, Sung-Hwan (Department of Nano Science and Technology, University of Seoul) ;
- Sok, Jung-Hyun (Department of Nano Science and Technology, University of Seoul) ;
- Park, Kyoung-Wan (Department of Nano Science and Technology, University of Seoul) ;
- Hong, Wan-Shick (Department of Nano Science and Technology, University of Seoul)
- Published : 2008.02.14
Abstract
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