Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
- /
- Pages.267-267
- /
- 2008
R&D용 원자층 증착기술 및 증착장비(ALD) 소개
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Choe, Gyu-Jeong
(NCD Technology) ;
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Sin, Ung-Cheol
(NCD Technology)
- Published : 2008.02.14
Abstract
Keywords