한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

레이저 어블레이션 시뮬레이션 - 1 차원 비대칭 용량결합형 모델 -

The Simulation of Pulsed Laser Ablation - One-dimensional CCP Model -

  • 소순열 (목포대학교 전기제어신소재공학부) ;
  • 정해덕 (목포대학교 전기제어신소재공학부) ;
  • 박계춘 (목포대학교 전기제어신소재공학부)
  • So, Soon-Youl (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Chung, Hae-Deok (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
  • Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
  • 발행 : 2008.04.17
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초록

In this paper, we developed a hybrid simulation model of carbon laser ablation under the Ar plasmas consisted of fluid and particle methods. Three kinds of carbon particles, which are carbon atom, ion and electron emitted by laser ablation, are considered in the computation. In the present simulation, we adopt capacitively coupled plasma with asymmetrical electrodes. As a result, in Ar plasmas, carbon ion motions were suppressed by a strong electric field and were captured in Ar plasmas. Therefore, a low number density of carbon ions were deposited upon substrate. In addition, the plume motions in Ar gas atmosphere was also discussed.

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