한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
- /
- Pages.405-406
- /
- 2008
폴리머 기판상에 제작한 Indium Zinc Oxide 박막의 특성
Characteristics of Indium Zinc Oxide thin films deposited on polymer substrate
-
Rim, You-Seung
(Dept. of Electrical Engineering, Kyungwon Univ.) ;
- Kim, Sang-Mo (Dept. of Electrical Engineering, Kyungwon Univ.) ;
- Lee, Won-Jae (Dept. of Electronic Engineering, Kyungwon Univ.) ;
- Kim, Kyung-Hwan (Dept. of Electrical Engineering, Kyungwon Univ.)
- 발행 : 2008.06.19
초록
The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates by facing targets sputtering. IZO thin films deposited as functions of gas flow ratio on PES and glass substrates, respectively. The electrical, optical and structural properties of IZO thin films were evaluated by a Hall Effect Measurement, an X-Ray Diffractormeter, UV/VIS spectrometer in visible range and a scanning electron microscopy, respectively. As-deposited IZO thin films exhibited resistivity of