Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.333-334
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- 2008
Properties of MIM Ceramic Thin Film Structure
MIM 세라믹 박막 구조의 특성 분석
- Kim, Jin-Sa (Chosun College of Science & Technology) ;
- Cho, Choon-Nam (Kwangwoon Univ.) ;
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Choi, Woon-Shick
(Daibul Univ.) ;
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Song, Min-Jong
(Kwangju Health Col.) ;
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So, Byeong-Mun
(Chonbuk Univ.) ;
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Kim, Chung-Hyeok
(Kwangwoon Univ.)
- Published : 2008.06.19
Abstract
The SCT thin films were deposited on Pt-coated electrode using RF sputtering method according to the deposition condition. The crystallinity of SCT thin films were increased with increase of deposition temperature in the temperature range of 100~500[