Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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I-V Characteristics of $KNO_3$ Electrolyte for ECMP Application

ECMP 적용을 위한 $KNO_3$ 전해액의 I-V 특성 고찰

  • Han, Sang-Jun (Department of Electrical Engineering, Chosun University) ;
  • Lee, Young-Kyun (Department of Electrical Engineering, Chosun University) ;
  • Park, Sung-Woo (Department of Electrical Engineering, Chosun University) ;
  • Lee, Woo-Sun (Department of Electrical Engineering, Chosun University) ;
  • Seo, Yong-Jin (Department of Electrical Engineering, Daebul University)
  • Published : 2008.06.19
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Abstract

본 논문에서는 최적화된 ECMP 공정을 위하여 I-V 특성 곡선과 CV법을 이용하여 패시베이션 막의 active, passive, transient, trans-passive 영역의 전기화학적 특성을 알아보았으며, Cu막의 표면 형상을 Scanning Electron Microscopy (SEM) 측정과 금속 화학적 조성을 Energy Dispersive Spectroscopy (EDS) 분석을 통해 분석하였다.

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