Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.28-28
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- 2008
Combinatorial Approach for Systematic Studies in the Development of Transparent Electrodes
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Kim, Tae-Won
(NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
- Kim, Sung-Dae (NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
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Heo, Gi-Seok
(NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology) ;
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Lee, Jong-Ho
(NanoelectronicsTeam, Gwangju Research Center, Korea Institute of Industrial Technology)
- Published : 2008.06.19
Abstract
We have demonstrated the combinatorial synthesis of a variety of transparent conducting oxides using a combinatorial sputter system. The effects of a wide range of Nb or Zn doping rate on the optical and electrical properties of Indium-tin oxides (ITO) films were investigated. The Nb or Zn doped ITO films were fabricated on glass substrates, using combinatorial sputtering system which yields a linear composition spread of Nb or Zn concentration in ITO films in a controlled manner by co-sputtering two targets of ITO and