한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.442-442
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- 2008
고주파유도결합에 의해 여기된 물플라즈마로부터 고효율 수소생산을 위한 메탄가스 첨가효과
Effect of $CH_4$ addition to the $H_2O$ plasma excited by VHF ICP for production of $H_2$
- 김대운 (군산대학교) ;
- 추원일 (군산대학교) ;
- 장수욱 (국가핵융합연구소) ;
- 정용호 (국가핵융합연구소) ;
- 이봉주 (국가핵융합연구소) ;
- 김영호 (군산대학교) ;
- 이승헌 (군산대학교) ;
- 권성구 (군산대학교)
- Kim, Dae-Woon (Kunsan National Univ.) ;
- Choo, Won-Il (Kunsan National Univ.) ;
- Jang, Soo-Ouk (National Fusion Research Institute) ;
- Jung, Yong-Ho (National Fusion Research Institute) ;
- Lee, Bong-Ju (National Fusion Research Institute) ;
- Kim, Young-Ho (Kunsan National Univ.) ;
- Lee, Seung-Heun (Kunsan National Univ.) ;
- Kwon, Sung-Ku (Kunsan National Univ.)
- 발행 : 2008.11.06
초록
Hydrogen was produced by water plasma excited in very high frequency inductively coupled tube reactor. Mass spectrometry was used to monitor gas phase species at various process conditions. Water dissociation rate depend on the process parameters such as ICP power, flow-rate and pressure. Water dissociation percent in ICP reactor decrease with increase of chamber pressure and