Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Enhanced characteristics of TCO films with $(SiO_2)_3(ZnO)_7$ gas barrier layer on various plastic substrates

다양한 플라스틱 기판위에 $(SiO_2)_3(ZnO)_7$ 보호층을 갖는 투명 전도성 박막들의 특성 향상

  • Kwon, Oh-Jeong (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Kim, Dong-Yung (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Ryu, Sung-Won (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Sohn, Sun-Young (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Hong, Woo-Pyo (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Kim, Hwa-Min (Department of Electronics Engineering, Catholic University of Daegu) ;
  • Hong, Jae-Suk (CTC Co.,Ltd.)
  • 권오정 (대구가톨릭대학교 전자공학과) ;
  • 김동영 (대구가톨릭대학교 전자공학과) ;
  • 유성원 (대구가톨릭대학교 전자공학과) ;
  • 손선영 (대구가톨릭대학교 전자공학과) ;
  • 홍우표 (대구가톨릭대학교 전자공학과) ;
  • 김화민 (대구가톨릭대학교 전자공학과) ;
  • 홍재석 ((주)씨티씨)
  • Published : 2008.11.06
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Abstract

Electrical and optical characteristics of indium tin oxide (ITO) and indium zinc oxide (IZO) films without and with $(SiO_2)_3(ZnO)_7$ at.% (SZO) film deposited on poly(ethylene naphthalate) (PEN) and poly(ethylene terephthalate (PET) substrates as a gas barrier layer for flexible display were studied. The ITO and IZO films with SZO gas barrier layer showed the improved properties which were both the high transmittance of average 80% in the visible light range and the decreased sheet resistance as compared to those of ITO and IZO films without SZO layer. Particularly, the PEN substrate with only SZO gas barrier layer had a low water vapor transmission rate (WVTR) of $\sim10^{-3}g/m^2$/day. Thus, we suggest that the SZO film with protection ability against the water vapor permeation can be applied to gas barrier layer for flexible display.

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