한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.273-273
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- 2008
SiC 버퍼충위 스퍼터링법으로 증착된 극한 환경용 AlN박막의 SAW 특성
SAW characteristics of AlN films sputtered on SiC buffer layer for harsh environment applications
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Hoang, Si-Hong
(School of Electrical Eng., University of Ulsan) ;
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Chung, Gwiy-Sang
(School of Electrical Eng., University of Ulsan)
- 발행 : 2008.11.06
초록
This paper describes the frequency response of two-port surface acoustic wave (SAW) resonator made of 002-polycrystalline aluminum nitride (AlN) thin film on 111-poly 3C-SiC buffer layer. In there, Polycrystalline AlN thin films were deposited on polycrystalline 3C-SiC buffer layer by pulsed reactive magnetron sputtering system, the polycrystalline 3C-SiC was grown on