한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.260-261
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- 2008
후열처리에 따른 Indium Zinc Oxide(IZO) 박막의 특성변화
Effect of annealing on the properties of zinc doped indium oxide(IZO) films
- Kim, Dae-Hyun (Kyungwon University) ;
- Kim, Sang-Mo (Kyungwon University) ;
- Choi, Hyung-Wook (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University) ;
- Rim, You-Seong (Kyungwon University)
- 발행 : 2008.11.06
초록
In this study, we investigated the properties of Indium Zinc Oxide (IZO) films prepared in facing targets sputtering (FTS) system at room temperature as function of oxygen contents. As as-deposited films were rapidly thermal annealing on air atmosphere of